Wafer Fabrication: Automatic Material Handling System

by Jie Zhang

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Format:Hardcover

Language:English

ISBN:3110486903

ISBN13:9783110486902

Release Date:September 2018

Publisher:de Gruyter

Length:284 Pages

Weight:1.44 lbs.

Dimensions:0.7" x 6.7" x 9.6"

Grade Range:Postsecondary

Related Subjects

Engineering Technology

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Wafer Fabrication: Automatic Material Handling System

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