Silicon Processing for the VLSI Era

Though this was not my first book on devices, I think it is an excellent resource for beginners.

"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor processing and nano-fabrication in existence. Practical processing techniques as well as their underlying fundamental principles are thoroughly covered in detail. This book has been indispensable to me during my graduate education and has the solution to just about every fabrication problem I have encountered in my 5+ years of experience. I highly recommend this book to anyone who is trying to build a semiconductor device or just curious about how such things are done.

In my 25 years of semiconductor process development I have never come across such a complete and in-depth collection of device and process knowledge in a single place. Years ago we needed to spend many hours with the journals to extract the requisite information to supplement our laboratory efforts. These volumes synthesize the basics with the most modern techniques now employed in advanced technologies. In addition, many subtle processing difficulties are addressed as well which will be much appreciated by the researcher. Through the years I have purchased in excess of 100 text references and none comes as close to these in the total knowledge contained within. These volumes are intended for the researchers and engineers working in this field yet they are so very well written and easy to comprehend that any one with such an interest in this field can understand them. Study these volumes completely.

This book provides an outstanding presentation of Silicon processing technology that is technically current, rich in detail, and most importantly, factually correct. The new edition of this book appears to have been completely rewritten, and covers every important area of Silicon processing in a comprehensive manner. I especially enjoyed that fact that in each chapter of the book the basic principles underlying a technology are explained first, and these explanations are then integrated into descriptions of the relevant technology (i.e. PVD, CVD, CMP etc.). The two Lithography sections are beautifully done, and contain lucid explanations of concepts that I have not seen anywhere else.For anyone who is seriously interested in semiconductor manufacturing, this book is a "must have". No other volume even comes close to being this comprehensive.

A thorough, if somewhat dry (makes the wall street journal look like a Sweet Valley High novel) treatment of modern semiconductor fabrication processes. This text is intended as a detailed overview of the processes involved in semiconductor design, particularly MOS technologies. In this regard it works well, through it shouldn't be considered a reference manual for the wafer fabrication engineer. A good summary for people who, like myself, work in the semiconductor industry, but do not deal with the details of fabrication processes on a daily basis.