Semiconductor Measurements and Instrumentation

Don't be put off by the fact that the book was written in 1998. While Moore's Law is still ongoing in the semiconductor industry, much of the book's material is quite up to date. The measurement techniques are mostly fundamental. Runyan describes the many different properties of a semiconductor chip and how you can measure these. This is then related to how best the chip can be characterised. Or, in some cases, a given circuit. Accompanying this is a natural complementary description of a variety of instruments. So the ideas behind such devices as a TEM or an SEM are explained. The quantum mechanical aspect of some of the measurements is gone into only slightly. Mostly directed at the experimentalist.