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Paperback Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing Book
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ISBN: 1447157435

ISBN13: 9781447157434

Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

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Format: Paperback

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Book Overview

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement,...

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Engineering Technology

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