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Hardcover Polymeric Materials for Microelectronic Applications: Science and Technology Book
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ISBN: 0841230552

ISBN13: 9780841230552

Polymeric Materials for Microelectronic Applications: Science and Technology

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Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry...

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Format: Hardcover

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Engineering Science Science & Math Science & Scientists Science & Technology Technology

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