Plasma Diagnostics: Surface Analysis and Interactions (Volume 2) (Plasma-Materials Interactions, Volume 2)
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Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Plasmas are used in microelectronics to process semiconductors (etching of patterns for microcircuits, plasma-induced deposition of thin films, etc.); plasmas produce deleterious erosion effects on surfaces of materials used for fusion devices and spaceships exposed to the low earth environment. Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject. short version, TJE_ Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject.
Format:Hardcover
Language:English
ISBN:0120676362
ISBN13:9780120676361
Release Date:March 1989
Publisher:Academic Press
Length:337 Pages
Weight:1.45 lbs.
Dimensions:9.0" x 0.5" x 6.0"
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