Microsensors: Principles and Applications
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Book Overview
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors-the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array...
Format:Paperback
Language:English
ISBN:0471941360
ISBN13:9780471941361
Release Date:August 1994
Publisher:Wiley
Length:344 Pages
Weight:0.95 lbs.
Dimensions:0.9" x 6.6" x 9.5"
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