Micromechanics and Mems: Classic and Seminal Papers to 1990

Dr. Trimmer's book is a wealth of articles from the early days of MEMS. I highly recommend it for any serious students and professionals in the field. For the student it provides insights into the original research and development. The first, and perhaps most significant paper that I recommend for students is "Microrobots and Micromechanical Systems" beginning on page 96. An understanding of scaling laws, as presented in this paper, is essential to an understanding of the potential and utility of MEMS. The professional will also find this book to be an excellent desk reference.

This book is a wonderful addition to the currently limited, quality books on MEMS. Sums up the history of the field quite well. Includes many hard to find articles with many interesting comments by one of the early members of the field, Dr. William Trimmer.

A good introduction to the early history of MEMS. The only drawback is that Trimmer has felt the need to include as many of his personal papers as possible. This blatant self-aggrandizement brings into question the validity of some of his selections.

Everyone interested in MEMS should have a copy of this book. A good introduction to the early, and piviotal papers in the field.

Excellent tutorial review of small mechanical systems (also called Microelectromechanical Systems, and micro system technology, mst, and Micro Machines). The first chapter is especially helpful