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Hardcover Materials and Failures in Mems and Nems Book

ISBN: 1119083605

ISBN13: 9781119083603

Materials and Failures in Mems and Nems

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing... This description may be from another edition of this product.

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Format: Hardcover

Condition: New

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Related Subjects

Engineering Technology

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