Materials and Failures in Mems and Nems

by Baldev Raj

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is...

Format:Hardcover

Language:English

ISBN:1119083605

ISBN13:9781119083603

Release Date:October 2015

Publisher:Wiley-Scrivener

Length:432 Pages

Weight:2.00 lbs.

Dimensions:1.1" x 7.2" x 10.1"

Related Subjects

Engineering Technology

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Materials and Failures in Mems and Nems

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