Lecture Notes on Principles of Plasma Processing
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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed...
Format:Paperback
Language:English
ISBN:0306474972
ISBN13:9780306474972
Release Date:January 2003
Publisher:Springer
Length:208 Pages
Weight:1.00 lbs.
Dimensions:0.5" x 8.3" x 11.0"
Related Subjects
Engineering Science Science & Math Science & Scientists Science & Technology TechnologyCustomer Reviews
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