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Science & Math Books > Physics Books
Paperback Ion Sources Book
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ISBN: 3642085024

ISBN13: 9783642085024

Ion Sources

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Format: Paperback

Condition: New

$249.99
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Book Overview

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

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Electrical & Electronics Engineering Science Science & Math Science & Scientists Science & Technology Technology

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