Ion Implantation: Basics to Device Fabrication

by Emanuele Rimini

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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci-...

Format:Hardcover

Language:English

ISBN:0792395204

ISBN13:9780792395201

Release Date:December 1994

Publisher:Springer

Length:393 Pages

Weight:1.64 lbs.

Dimensions:0.9" x 6.1" x 9.2"

Related Subjects

Chemical Chemistry Electrical & Electronics Engineering Inorganic Nuclear Physics Physics Science Science & Math Science & Scientists Science & Technology Technology

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Ion Implantation: Basics to Device Fabrication

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