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Paperback Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice Book

ISBN: 1441935746

ISBN13: 9781441935748

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

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Format: Paperback

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Book Overview

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.-...

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Engineering Technology

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