Micromachining and Microfabrication

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Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch... This description may be from another edition of this product.

Format:Hardcover

Language:English

ISBN:0819423793

ISBN13:9780819423795

Release Date:October 1997

Publisher:SPIE-International Society for Optical Engine

Length:692 Pages

Weight:3.25 lbs.

Dimensions:1.7" x 7.4" x 10.3"

Related Subjects

Engineering Technology

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Micromachining and Microfabrication

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