Fundamental Aspects of Plasma Chemical Physics: Kinetics
(Book #85 in the Springer Series on Atomic, Optical, and Plasma Physics Series)
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Book Overview
Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace,...
Format:Hardcover
Language:English
ISBN:1441981845
ISBN13:9781441981844
Release Date:November 2015
Publisher:Springer
Length:318 Pages
Weight:1.42 lbs.
Dimensions:0.8" x 6.1" x 9.2"
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