Design for Manufacturability with Advanced Lithography

by David Z Pan, Bei Yu, David Z. Pan

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Book Overview

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM...

Format:Paperback

Language:English

ISBN:3319373935

ISBN13:9783319373935

Release Date:August 2016

Publisher:Springer

Length:164 Pages

Weight:0.57 lbs.

Dimensions:0.4" x 6.1" x 9.2"

Related Subjects

Computers Computers & Technology Engineering Technology

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Design for Manufacturability with Advanced Lithography

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