Design for Manufacturability with Advanced Lithography

by David Z Pan, Bei Yu, David Z. Pan

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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM...

Format:Hardcover

Language:English

ISBN:3319203843

ISBN13:9783319203843

Release Date:November 2015

Publisher:Springer

Length:164 Pages

Weight:0.94 lbs.

Dimensions:0.4" x 6.1" x 9.2"

Related Subjects

Computers Computers & Technology Engineering Technology

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Design for Manufacturability with Advanced Lithography

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