CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

by Flora Li and Arokia Nathan

No Customer Reviews

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although...

Format:Hardcover

Language:English

ISBN:354022680X

ISBN13:9783540226802

Release Date:March 2005

Publisher:Springer

Length:232 Pages

Weight:1.19 lbs.

Dimensions:0.6" x 6.2" x 9.0"

Related Subjects

Engineering Science Science & Math Science & Scientists Science & Technology Technology

Customer Reviews

0 rating

Write a review

ThriftBooks sells millions of used books at the lowest everyday prices. We personally assess every book's quality and offer rare, out-of-print treasures. We deliver the joy of reading in recyclable packaging with free standard shipping on US orders over $15. ThriftBooks.com. Read more. Spend less.

Copyright © 2024 Thriftbooks.com Terms of Use | Privacy Policy | Do Not Sell/Share My Personal Information | Cookie Policy | Cookie Preferences | Accessibility Statement
ThriftBooks^® and the ThriftBooks^® logo are registered trademarks of Thrift Books Global, LLC

CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

Recommended

Customer Reviews

Popular Categories

Website

My Account

Partnerships

Quick Help

About Us

Follow Us