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Hardcover Atomic Layer Deposition 2e Book
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ISBN: 1118062779

ISBN13: 9781118062777

Atomic Layer Deposition 2e

by , , , et al.
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Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of...

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Format: Hardcover

Condition: New

$204.54
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Engineering Technology

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