Advanced Mechatronics and Mems Devices

by Dan Zhang

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Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional...

Format:Paperback

Language:English

ISBN:1489997458

ISBN13:9781489997456

Release Date:October 2014

Publisher:Springer

Length:252 Pages

Weight:0.82 lbs.

Dimensions:0.6" x 6.1" x 9.2"

Related Subjects

Engineering Technology

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